| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_89afae566b725ae78e20cf972d9bcdc7 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09J5-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-683 |
| filingDate |
2013-11-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d986044d0f10544813c345d2954db4c3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_610a1b8eb1c92d2bdbc2b837149ead9c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e96599b47368b0d64e71ba01f8b89c69
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ef7c4b0bbe6986b1970854b479d2bd54
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_95097b9684b88e5373d751917abf2480 |
| publicationDate |
2015-05-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2015098565-A |
| titleOfInvention |
Processing method |
| abstract |
A first support is separated from a laminate without dissolving a second adhesive layer. The processing method includes a first attaching step of attaching a substrate to a surface of the first support plate on which a separation layer is provided, and then the first support plate of the substrate is attached. The second support step of attaching the second support plate 23 to the surface facing away from the surface, and after the second attachment step, the separation layer 14 is irradiated with light to alter the separation layer 14 and thereby the first support. A separation step of separating the plate 13 and the substrate 11. [Selection] Figure 1 |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2018216433-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20190126852-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102281480-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2018216433-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-6991206-B2 |
| priorityDate |
2013-11-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |