http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015062057-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fcc0b66123940d1b32783569ebfa2d45 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-038 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C309-12 |
| filingDate | 2014-07-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fa485c7f56d146cd9f855a87b1388ab7 |
| publicationDate | 2015-04-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2015062057-A |
| titleOfInvention | Radiation sensitive resin composition, resist pattern forming method, radiation sensitive acid generator and compound |
| abstract | A radiation-sensitive resin composition that exhibits excellent MEEF performance, depth of focus, and exposure margin, and forms a resist pattern having excellent LWR performance, CD uniformity, resolution, and rectangular cross-sectional shape. The purpose is to provide. The present invention includes a polymer having a structural unit containing an acid-dissociable group, a compound comprising a radiolytic onium cation and a counter anion, and a solvent, wherein the counter anion has a carbonyl group. It is a radiation sensitive resin composition which has 2 or more and the said carbonyl groups couple | bond together through a single bond or a C1-C10 substituted or unsubstituted alkanediyl group. [Selection figure] None |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2018155908-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2016002634-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2016002634-A1 |
| priorityDate | 2013-08-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 454.