http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012242813-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fcc0b66123940d1b32783569ebfa2d45 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 |
| filingDate | 2011-05-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_27ce997496ad602504ce5bcdd2f965aa |
| publicationDate | 2012-12-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2012242813-A |
| titleOfInvention | Radiation-sensitive resin composition and resist pattern forming method |
| abstract | The present invention provides a radiation-sensitive resin composition and a resist pattern forming method that are excellent in nanoedge roughness suppression and resolution. A radiation-sensitive acid generator and a polymer having a structural unit containing an acid-dissociable group are contained, and the diffusion coefficient of an acid generated from the radiation-sensitive acid generator at 105 ° C. is 0.01 nm 2. / Sec or less radiation sensitive resin composition. The radiation-sensitive acid generator is preferably a compound represented by the following formula (1). R 1 in formula (1) is more preferably an organic group containing a group represented by the following formula (i). More preferably, at least one of X 1 and X 2 in formula (i) is —CO— or —COO—. It is preferable that at least one fluorine atom or fluorinated alkyl group is bonded to the carbon atom adjacent to SO 3 — of R 1 in Formula (1). [Selection figure] None |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2019189655-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2019008300-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2015174215-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015062057-A |
| priorityDate | 2011-05-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 461.