http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015032792-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_669c01133740c5233f2c8738904ea3af |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B29C59-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B29C33-74 |
| filingDate | 2013-08-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8eae72ac74d25d1dbf6bebb7f86c6165 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_88131e378b5e15ed057830cbf219b769 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_24309b66389c6a76d89b792346dde54a http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a15828035f049e5390bfb6b355f72853 |
| publicationDate | 2015-02-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2015032792-A |
| titleOfInvention | Template imperfection correction method, inspection method, and manufacturing method for nanoimprint lithography |
| abstract | An NIL template defect correction method, inspection method, and manufacturing method capable of detecting minute black defects are provided. A defect correction method for a template for NIL, wherein a first template preparation step for preparing a first template and an inspection template for producing an inspection template by imprint transfer using the first template are provided. A template preparation step, an inspection template inspection step for inspecting a white defect portion of the inspection template, and the first template in which the white defect portion is transferred when the white defect portion is detected in the inspection template. A first template defect confirming step for confirming the black defect portion, and a first template defect correcting step for correcting the black defect portion when the black defect portion is detected in the first template. Template defect correction method. [Selection] Figure 1 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016149506-A |
| priorityDate | 2013-08-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 26.