http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012204429-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0950e9df7f0e1b73efee1bda859951ad |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y10-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y40-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0002 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B29C59-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B29C33-38 |
| filingDate | 2011-03-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_39f4aac722387e08c6dc5c102dbd8f7d |
| publicationDate | 2012-10-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2012204429-A |
| titleOfInvention | Imprint template, manufacturing method thereof, and pattern forming method |
| abstract | PROBLEM TO BE SOLVED: To provide an imprint template capable of irradiating a photocurable resin with light of uniform light intensity in a template region, a manufacturing method thereof, and a pattern forming method. An imprint template according to an embodiment has a first substrate, and a first photo-curing resin having a first concavo-convex pattern is provided on a main surface of the first substrate. Second light having a second concavo-convex pattern having a pattern density different from that of the first concavo-convex pattern on the main surface of the first substrate and having a light transmittance different from that of the first photocurable resin. A cured resin is provided. [Selection] Figure 1 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016207693-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015032792-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109155237-A |
| priorityDate | 2011-03-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 39.