| abstract |
The present invention relates to a chemically amplified positive photosensitive organic insulating film composition and a method of forming an organic insulating film using the same, and in the chemically amplified positive photosensitive organic insulating film composition containing a binder resin, The binder resin includes a unit that includes an acid-decomposable protecting group having a ring structure, and includes a polymer or a copolymer including the unit. According to the present invention, unlike the prior art, the acid-decomposable protecting group having a ring structure and a newly developed chemical structure are formed in the form of a copolymer, thereby not only significantly increasing the sensitivity but also not developing during development. The reduction in the film thickness of the exposed area can be significantly reduced, the generation of volatile vapor during exposure can be significantly reduced, the display can be realized with high resolution, and the high transmittance can be maintained. There is. |