http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014507790-A
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02E10-52 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0757 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-0543 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-1892 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-0547 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-346 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-34 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L31-046 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20 |
| filingDate | 2011-12-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2014-03-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2014507790-A |
| titleOfInvention | Method for producing large-area fine pattern using laser interference lithography, non-planar transfer method for fine pattern produced using the method, and article having fine pattern transferred using the same |
| abstract | The present invention relates to a non-planar transfer method of a fine pattern, and an article obtained by transferring a fine pattern using the method, and more specifically, a sacrificial layer and a pattern forming layer are coated on a planar substrate. A method of transferring a fine pattern in a non-planar manner by forming a fine pattern on the coated pattern formation layer in a large area, separating the pattern formation layer to which the fine pattern has been transferred, and bonding the pattern formation layer to an object to be applied. And an article to which a fine pattern is transferred using the same. [Selection] Figure 1 |
| priorityDate | 2010-12-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 24.