| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b9a255559e1d94f20510a17a673b1078 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N30-8554
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N30-2047 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N30-074
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N30-081
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N30-078 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-187
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-09
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-39 |
| filingDate |
2013-02-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f333cabd1a35445fed0f9f08fafe6761 |
| publicationDate |
2014-08-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2014154581-A |
| titleOfInvention |
Heating method, piezoelectric film and piezoelectric element manufacturing method, droplet discharge head, droplet discharge device, and light irradiation device |
| abstract |
A method of heating a film, etc., in which energy control of irradiation light is easy. A step of forming an amorphous PZT film 14 as a heated layer on one side of a platinum film 13 as a light absorption layer, and light from the other side opposite to the one side of the light absorption layer 13 Irradiating the absorption layer 13 with continuous wave laser light 71x to heat the light absorption layer 13. The heat of the platinum film 13 is transmitted (diffused) to the amorphous PZT film 14 formed on one side of the platinum film 13, and the amorphous PZT film 14 is locally heated from the platinum film 13 side. The heated portion of the amorphous PZT film 14 is changed in film quality (crystallized) to become crystalline PZT 15. [Selection] Figure 1 |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2016132638-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10060044-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10276778-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10801113-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10424718-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I587551-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2016132638-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9583694-B2 |
| priorityDate |
2013-02-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |