http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011114087-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b9a255559e1d94f20510a17a673b1078 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-39 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-187 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-317 |
| filingDate | 2009-11-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e310b9bc082613f6a880c3ce54bce465 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_24f03e05e907954103c84b173e5f2164 |
| publicationDate | 2011-06-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2011114087-A |
| titleOfInvention | Thin film manufacturing method and thin film element |
| abstract | A thin film manufacturing method capable of manufacturing a thin film of stable quality at a low cost is provided. A method of manufacturing a thin film, in which a substrate 20 is placed in a raw material solution of a thin film to be formed on a substrate 20, and a light absorption rate of a solvent in the raw material solution from a first light source 13 is a predetermined value. The first light of the substrate 20 is irradiated by irradiating the first light having a wavelength that is equal to or greater than the threshold, and irradiating the second light having a wavelength lower than that of the first light from the second light source 14. A first forming step of forming a thin film on the main surface 20a. [Selection] Figure 1 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012234927-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013157509-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014154581-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9512521-B2 |
| priorityDate | 2009-11-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 51.