http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014116331-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5c6a9fd6219b32cd3893a49979951bf4 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-458 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-683 |
| filingDate | 2012-11-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_83e2d4d6666d780b2aa54dd7bd709d10 |
| publicationDate | 2014-06-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2014116331-A |
| titleOfInvention | Crystal growth apparatus, crystal growth method and susceptor |
| abstract | A growth layer is uniformly grown on a substrate placed on a susceptor. In a susceptor 10, a lower plate 11 is used as a portion corresponding to a conventional susceptor 90. In order to fix the substrate 50, the lower plate 11 and the upper plate 12 are used separately. Since the thermal conductivity of the upper plate 12 is set lower than that of the lower plate 11 and the substrate 50, the heat conduction efficiency to the upper plate 12 is further lower than the heat conduction efficiency to the substrate 50. The surface temperature can be lowered. Further, the temperature of the inner surface of the opening 121 facing the side surface of the substrate 50 is lower than the temperature of the inner surface of the recess 91 in the conventional susceptor 90. [Selection] Figure 2 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2019104679-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7230679-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2017043165-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2020188148-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10865501-B2 |
| priorityDate | 2011-11-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 29.