| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_24aca9ded2638ea793d05360dde7a4a0 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F220-38
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F220-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-038 |
| filingDate |
2013-11-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a144f3526dc1d67cb5c2c69f8714bf36
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_74ec0389ad203e5a8a19fdbbfffb23b7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_36616a7dfdb0a7e59c6f4b808e61f918 |
| publicationDate |
2014-06-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2014115636-A |
| titleOfInvention |
Resist composition and method for producing resist pattern |
| abstract |
Provided is a resist composition capable of producing a negative resist pattern with excellent line edge roughness. An acid labile group comprising a (meth) acrylate structural unit having an alicyclic hydrocarbon group in a side chain and a (meth) acrylate structural unit having a fluorine atom-containing saturated hydrocarbon group in a side chain, Resist composition containing resin which does not have, resin containing structural unit represented by Formula (II), and structural unit which has an acid labile group, and an acid generator. [Selection figure] None |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013041266-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2023120616-A1 |
| priorityDate |
2012-11-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |