Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_24aca9ded2638ea793d05360dde7a4a0 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F220-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F220-22 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-038 |
filingDate |
2013-10-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_36616a7dfdb0a7e59c6f4b808e61f918 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3da7cce5f8198286bad6706fba87bc7b http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a144f3526dc1d67cb5c2c69f8714bf36 |
publicationDate |
2014-06-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
JP-2014115628-A |
titleOfInvention |
Resist composition and method for producing resist pattern |
abstract |
An object of the present invention is to provide a resist composition capable of producing a resist pattern having an excellent shape. A resin comprising a structural unit represented by the formula (I) and a structural unit represented by the formula (a4) and having no acid labile group, a structural unit represented by the formula (II) And a resist composition containing a resin containing a structural unit having an acid labile group, and an acid generator. [Selection] Figure 1 |
priorityDate |
2012-11-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |