http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014112208-A
Outgoing Links
Predicate | Object |
---|---|
assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_24aca9ded2638ea793d05360dde7a4a0 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-038 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F20-00 |
filingDate | 2013-10-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_04d3730b6ad527289e0c18d5b14850d2 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c2a9aacf507db12b95a8f92ddad3e63f http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a144f3526dc1d67cb5c2c69f8714bf36 |
publicationDate | 2014-06-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-2014112208-A |
titleOfInvention | Resist composition and method for producing resist pattern |
abstract | An object of the present invention is to provide a resist composition capable of producing a resist pattern having excellent line edge roughness. A resin having a structural unit represented by formula (I) and a structural unit represented by formula (a4) and having no acid labile group, a resin having an acid labile group, an acid A resist composition containing a generator and a compound represented by formula (D). [Wherein R 1 and R 3 are a hydrogen atom or a methyl group; R 2 is an alicyclic hydrocarbon group; L 1 is a divalent saturated hydrocarbon group or a single bond; R 4 is a saturated carbon having a fluorine atom. Hydrogen group; R D1 and R D2 each represent a hydrocarbon group, an alkoxy group, an acyl group, an acyloxy group, an alkoxycarbonyl group, a nitro group, or a halogen atom; m ′ and n ′ each represent an integer of 0-4. ] [Selection figure] None |
isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016108324-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016104856-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016113450-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11556056-B2 |
priorityDate | 2012-11-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 264.