| abstract |
A novel onium salt compound useful as an acid generator component of a photoresist composition and a method for synthesizing such a compound are provided. For example, 10- (5-((2- (1-ethylcyclopentyloxy) -2-oxoethoxy) carbonyl) -2-methoxyphenyl) -9-oxo-2- (trifluoromethyl) -4 , 4a, 9,10-tetrahydrothioxanthylium trifluoromethanesulfonate is treated with sodium iodide to form the iodide salt of the formula: 3-hydroxyadamantane-acetoxy-1,1,2,2 -The desired novel onium salt compound is prepared by treatment with tetrafluorobutane-1-sulfonic acid sodium salt. [Selection figure] None |