| abstract |
An object of the present invention is to provide a surface protective sheet suitable for use in a backside grinding process of a workpiece on which a modified region has been formed. Provided is a surface protection sheet capable of preventing contamination of a surface to be protected of a workpiece by suppressing water intrusion (sludge infiltration) on a protective surface. A surface protective sheet having a pressure-sensitive adhesive layer on a substrate, which satisfies the following requirements (a) to (d). (A) Young's modulus of the substrate is 450 MPa or more (b) Storage elastic modulus of the pressure-sensitive adhesive layer at 25 ° C. is 0.10 MPa or higher (c) Storage elasticity of the pressure-sensitive adhesive layer at 50 ° C. (D) The pressure-sensitive adhesive layer has a thickness of 30 μm or more. [Selection] FIG. |