http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014071287-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_89afae566b725ae78e20cf972d9bcdc7 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-30 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0397 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-40 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F220-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-40 |
| filingDate | 2012-09-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b800b46f1ca77d85db8efe078b92b37b http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_951815a3e5ea2ce63ab2bd0fb3d571cc http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d77141942773d7111cd6a6c9bd6f46df |
| publicationDate | 2014-04-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2014071287-A |
| titleOfInvention | Resist pattern forming method and resist composition |
| abstract | A resist pattern having a good shape is provided in the formation of a resist pattern that is rinsed after development. A structural unit represented by the formula (a0-1), a structural unit containing an acid-decomposable group whose polarity is increased by the action of an acid, and a group represented by the formula (a2-r-1) A method for forming a resist pattern, comprising: forming a resist film using a resist composition containing a polymer compound having a constitutional unit, exposing and developing the resist film; In the formula, R is a hydrogen atom, an alkyl group or a halogenated alkyl group; Ra 01 is a lactone-containing polycyclic group, an —SO 2 -containing polycyclic group or a polycyclic group having a cyano group; Ra ′ 21 is hydrogen Atom, alkyl group, alkoxy group, halogen atom, halogenated alkyl group, hydroxyl group, -COOR ", -OC (= O) R", hydroxyalkyl group or cyano group; R "is a hydrogen atom or alkyl group; n 'is It is an integer of 0-2. [Selection figure] None |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017027047-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10632456-B2 |
| priorityDate | 2012-09-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 344.