http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014040574-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fec576c38e34882531ca37d6b922bf42 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09J183-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09J11-06 |
| filingDate | 2013-07-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c804787843e02353fcadaec2aaee2fe5 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_56699c84e466add9994dfc0bb862916c http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_40a1ac5b357e55548262a1e59476b10f http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f996e12efece5e39f43110fd370c5b64 |
| publicationDate | 2014-03-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2014040574-A |
| titleOfInvention | Adhesive composition, adhesion method thereof, and peeling method after adhesion |
| abstract | When a silicon substrate is bonded to the support substrate and then peeled off at the time of manufacturing a semiconductor device, particularly at the time of through silicon via (TSV) processing, no bonding residue remains on the silicon substrate and bonding is quick. Provided is an adhesive composition having an adhesive force that can be applied by an adhesive operation and can withstand mechanical processing such as polishing. The photopolymerizable group includes a silicon compound having a photopolymerizable group, a photopolymerization initiator, and a foaming agent, and the photopolymerizable group is selected from the group consisting of an acryloyl group, a methacryloyl group, a vinyl group, an epoxy group, an oxetane group, and a vinyl ether group. An adhesive composition which is a photopolymerizable group containing at least one selected group. An adhesion method comprising a step of applying a hydrolysis condensate of an alkoxysilane having a photopolymerizable group to an adhesion surface of a glass substrate. [Selection figure] None |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014101495-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015179692-A |
| priorityDate | 2012-07-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 84.