http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014029490-A
Outgoing Links
Predicate | Object |
---|---|
assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_24aca9ded2638ea793d05360dde7a4a0 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F20-54 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-038 |
filingDate | 2013-06-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_670712e4c98df4c464bc1ac57747e207 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a144f3526dc1d67cb5c2c69f8714bf36 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_36616a7dfdb0a7e59c6f4b808e61f918 |
publicationDate | 2014-02-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-2014029490-A |
titleOfInvention | Resist composition and method for producing resist pattern |
abstract | A resist composition capable of producing a resist pattern with an excellent DOF is provided. A resist composition containing a resin having a structural unit represented by formula (I) and an acid generator represented by formula (II). [Wherein, ring X 1 is a halogen atom, hydroxy group, hydrocarbon group, alkoxy group, heterocyclic group optionally substituted with an acyl group or acyloxy group, and X 2 is an alkane optionally substituted with a hydroxy group or the like. The diyl group and the methylene group constituting the alkanediyl group may be replaced with an oxygen atom or a carbonyl group. R 4 is a hydrocarbon group which may be substituted with a fluorine atom or a hydroxy group. The methylene group contained may be replaced by an oxygen atom or a carbonyl group, Z + represents an organic cation. ] [Selection figure] None |
priorityDate | 2012-06-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 249.