http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011148983-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_24aca9ded2638ea793d05360dde7a4a0 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F220-58 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F220-38 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate | 2010-12-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_670712e4c98df4c464bc1ac57747e207 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a144f3526dc1d67cb5c2c69f8714bf36 |
| publicationDate | 2011-08-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2011148983-A |
| titleOfInvention | Resin, photoresist composition and method for producing resist pattern |
| abstract | A resin for a photoresist composition capable of forming a pattern having excellent resolution, focus margin, and exposure margin is provided. A resin having a structural unit derived from a compound represented by formula (I) and a structural unit derived from a compound represented by formula (II). [Wherein R 1 and R 31 are a hydrogen atom, a halogen atom or an alkyl group optionally having a halogen atom; X 1 represents a heterocyclic group, and the hydrogen atom contained in the heterocyclic group is a halogen atom; , hydroxyl, hydrocarbon group, alkoxy group, may be substituted with an acyl group like, -CH 2 contained in the heterocyclic group - may be replaced by -CO- or -O-; Z 1 is T represents a heterocyclic group containing —SO 2 — in the skeleton, and the hydrogen atom contained in the heterocyclic group is substituted with a halogen atom, a hydroxyl group, an alkyl group, or the like. Also good. ] [Selection figure] None |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013100475-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015033381-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012150166-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014029490-A |
| priorityDate | 2009-12-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 287.