| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6b822ee046eb6c45d1e3bd9ce9c1782e |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-76
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-3286
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-3284 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02631
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66969
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B28B11-243
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-3414
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-345
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-64
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02565
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-7869
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-78696
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-086
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-453
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-24 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-786
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B35-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-363 |
| filingDate |
2012-05-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_eb363e0baf3f4f6464b9bcafabd050ce
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cf0a77ffc22328298fb7190ebe0dee35
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_21747acfb77b0d181ab4dff0d66658d4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7128714b2c8c8d526c89f4c7303dc862
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1529047f378776a1c4c296aff77d717b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7ab94ab226b45df4ba747bc2c5b4643a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a0e7af6b55273d29b8e4ddfae853bff2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8cd54b123a684f895f190136e9ca3c5f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_94be08b26f8d4214f1b952ccdf04b9f1 |
| publicationDate |
2013-07-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2013144841-A |
| titleOfInvention |
Target, method for using target, and method for manufacturing semiconductor device |
| abstract |
A transistor using an oxide semiconductor may be less reliable than a transistor using amorphous silicon. Thus, a semiconductor device including a transistor including an oxide semiconductor with high reliability is manufactured. SOLUTION: A sputtering target made of an oxide semiconductor having a crystal region in which a c-axis is formed by mixing raw materials so as to obtain a composition ratio so that a crystal structure is obtained and is parallel to a normal vector on an upper surface is used. An oxide semiconductor film is formed by a sputtering method. [Selection] Figure 1 |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-6097458-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10636914-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2016103114-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2021533274-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2022518522-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7122457-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2016103114-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017123472-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2017017966-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2022019205-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10316404-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015046595-A |
| priorityDate |
2011-06-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |