http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013133345-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_26f787ebd46623d19884567098dc66d0 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G8-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-023 |
| filingDate | 2011-12-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_837bc776458914619fcbe3b3e0f30024 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d61604449b39950320d3a048e46604cc |
| publicationDate | 2013-07-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2013133345-A |
| titleOfInvention | NOVOLAC TYPE PHENOL RESIN AND PHOTORESIST COMPOSITION |
| abstract | The resist (protective film, mask) obtained has high sensitivity, high residual film ratio, and high resolution, and has high heat resistance, and the peeling phenomenon at the resist edge is suppressed, so that the substrate is not exposed to the substrate. It is an object of the present invention to provide a novolac type phenolic resin that can be suitably used for a photoresist composition that can have a stable adhesive property, and the photoresist composition. A novolac-type phenol resin in which a phenol having an alkyl-substituted phenol as an essential component and a crosslinked product composed of a compound containing a biphenyl ring or a benzene ring and / or formaldehyde is introduced at a specific ratio. The weight average molecular weight is 1000 or more and less than 4500 when the class is composed only of alkyl-substituted phenols, and the weight average molecular weight is 1000 or more and less than 5500 when the phenols contain alkyl-substituted phenol and unsubstituted phenol. The present invention relates to a novolac type phenol resin. [Selection figure] None |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014129430-A |
| priorityDate | 2011-12-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 130.