| abstract |
A hydrolyzable silicon compound such as alkoxysilane is used as a raw material, and can be easily synthesized. It is dissociated in the same molecule by irradiation with a hydrolyzable group such as an alkoxy group and a high-energy ray. Provided is a silicon compound having a photoacid generating group for generating. A general formula (1): in R 1 n A m SiB 4- ( n + m) (1) ( Formula (1), R 1 each independently represent a hydrogen atom, a straight-chain having 1 to 20 carbon atoms A branched or cyclic hydrocarbon group having 3 to 20 carbon atoms, wherein the carbon atom of the hydrocarbon group may be substituted with an oxygen atom, and may contain a fluorine atom. It is an acid-decomposable group, B is a hydrolyzable group, n is an integer of 0 to 2, m is an integer of 1 to 3, and n + m is an integer of 1 to 3. A silicon compound. [Selection figure] None |