http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013064194-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_24f54aefd7a75822ce9d6a7759e20068 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45529 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-401 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-40 |
| classificationIPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01B1-06 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-40 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01M8-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01M8-12 |
| filingDate | 2012-08-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_56215af2e3257151eb337c7bc9444a48 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4e09a56d1765f3783d0fa602f502f9c3 |
| publicationDate | 2013-04-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2013064194-A |
| titleOfInvention | Composite oxide film and manufacturing method thereof |
| abstract | A composite containing a trivalent A element, a tetravalent B element, and oxygen O and having a composition formula of A x B 6 O 1.5X + 12 (6 ≦ X ≦ 30) The A / B composition ratio of the oxide film is controlled to a desired value, and the film is obtained as a thin film. For example, first, second, and third raw material bottles 34, 36, and 38 containing, for example, an oxidant, a La (A element) supply source, and a Si (B element) supply source are connected to a main chamber 32, respectively. To do. By supplying La source, purging, supplying oxidant, purging, supplying Si source, purging, supplying oxidant and purging into the main chamber 32, the substrate 12 made of Si (100) or the like is formed. La 2 O 3 film and SiO 2 film are sequentially laminated. The La / Si composition ratio in La x Si 6 O 1.5X + 12 finally obtained can be controlled by adjusting the supply frequency ratio of the La source and the Si source. Note that the La source, the Si source, and the oxidizing agent circulate in parallel to the horizontal upper end surface of the substrate 12. [Selection] Figure 3 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2022209399-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2017018149-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10774012-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-6088715-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2018186704-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-107709603-A |
| priorityDate | 2011-08-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 40.