http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012226341-A
Outgoing Links
Predicate | Object |
---|---|
assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_24aca9ded2638ea793d05360dde7a4a0 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F20-38 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
filingDate | 2012-04-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cd54a8a70395012d8a7f964f5deb76cc http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_36616a7dfdb0a7e59c6f4b808e61f918 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a144f3526dc1d67cb5c2c69f8714bf36 |
publicationDate | 2012-11-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-2012226341-A |
titleOfInvention | Resist composition and method for producing resist pattern |
abstract | An object of the present invention is to provide a resist composition capable of producing a resist pattern with good CD uniformity. (A) a resin having a structural unit represented by formula (I), insoluble or hardly soluble in an alkaline aqueous solution, and soluble in an alkaline aqueous solution by the action of an acid; (B) an acid generator; (D) A resist composition containing a compound represented by the formula (II). [Wherein, ring T 1 is an optionally substituted sultone ring; Z 1 is an optionally substituted alkanediyl group, etc .; Z 2 is a single bond or a carbonyl group; R 1 is an alkyl group which may have a halogen atom, a hydrogen atom or a halogen atom; R 2 and R 3 are a hydrocarbon group, an alkoxy group, an acyl group, an acyloxy group, an alkoxycarbonyl group, a nitro group or a halogen atom, respectively. M and n each represents an integer of 0 to 4; ] [Selection figure] None |
isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013256653-A |
priorityDate | 2011-04-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 273.