http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012226333-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_24aca9ded2638ea793d05360dde7a4a0 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F220-22 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 |
| filingDate | 2012-04-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2f245ddfecb97f7771c44d356e4580e0 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a144f3526dc1d67cb5c2c69f8714bf36 |
| publicationDate | 2012-11-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2012226333-A |
| titleOfInvention | Resist composition and method for producing resist pattern |
| abstract | There is provided a resist composition capable of producing a resist pattern having excellent line edge roughness (LER) and having few defects. (A1) a resin having a structural unit represented by formula (I), (A2) a resin that is insoluble or hardly soluble in an aqueous alkali solution and can be dissolved in an aqueous alkaline solution by the action of an acid, and (B) an acid A resist composition comprising a generator and (D) a compound represented by formula (II). [Wherein, R 1 is a hydrogen atom or a methyl group; A 1 is — (CH 2 ) m1 —, — (CH 2 ) m2 —O— (CH 2 ) m3 — or — (CH 2 ) m4 —CO —O— (CH 2 ) m5 —, m1 to m5 are each an integer of 1 to 6; R 2 is a hydrocarbon group having a fluorine atom. ] [Selection figure] None |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101962666-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20150093777-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20150114901-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015301451-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102328545-B1 |
| priorityDate | 2011-04-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 261.