| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_24aca9ded2638ea793d05360dde7a4a0 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C309-17 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07D295-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate |
2012-03-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0106502b1821cd02a499d92f680621ab
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a144f3526dc1d67cb5c2c69f8714bf36 |
| publicationDate |
2012-11-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2012214442-A |
| titleOfInvention |
Salt, resist composition and method for producing resist pattern |
| abstract |
The present invention provides a salt, an acid generator, a resist composition, and the like capable of obtaining a resist pattern having an excellent focus margin. A salt represented by formula (I). [Wherein, R 1 is a hydroxy group or an alkyl group; R 2 and R 4 are each a hydrogen atom or an alkyl group; l is an integer of 0 to 3; m and n are each 1 or 2; and R 3 is Hydrogen atom or alkyl group; o is 0 or 1; R 5 and R 6 are each a fluorine atom or perfluoroalkyl group; L 1 is a divalent saturated hydrocarbon group; and Y may have a substituent. It represents an aliphatic hydrocarbon group or alicyclic hydrocarbon group which may have a good aliphatic hydrocarbon group or substituent. ] [Selection figure] None |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012215863-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014199389-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014048500-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2014017408-A1 |
| priorityDate |
2011-03-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |