http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012078859-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_424db9d56b06a23aed410fcf5df652f3 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-68 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 |
| filingDate | 2011-12-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_900cd30fd1e8ae68f3ffae3545a05bcc http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6d177c17eeb68e36fc85d995d44689f2 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ddddaccdf289710274cfa74b079de7c8 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0df0690401a5777c984f3c71fd6f7ac4 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_234f320334f9a97fe9e39a3fe7148a86 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b6f15efa7f293cac37028910748f4eaf |
| publicationDate | 2012-04-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2012078859-A |
| titleOfInvention | Etching method |
| abstract | A film comprising one or more layers formed on a transparent substrate, the outermost layer of the film being a method of etching a film made of a chromium-based material by chlorine-based dry etching, Etching mask for silicon oxide-based material film having a thickness of 1 to 10 nm formed using a hydrolyzable silane compound hydrolyzate / condensate, a crosslinking accelerator compound and a composition for forming a silicon oxide-based material film containing an organic solvent As a method of performing a chlorine-based dry etching on the outermost layer. [Effect] The etching mask film of the present invention has high etching resistance against chlorine dry etching, and a photomask blank is processed by using this etching mask film, so that it is thin even in chlorine dry etching. High-precision processing is possible with an etching mask film. [Selection figure] None |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2021166674-A1 |
| priorityDate | 2011-12-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 142.