http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012078831-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_026917a1661e94c21035d1c5d1fa135e |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B1-11 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B82Y40-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J19-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B29C59-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B29C33-38 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B1-118 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B29C45-26 |
| filingDate | 2011-09-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_72c5ec6aead41331c324767f2de93288 |
| publicationDate | 2012-04-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2012078831-A |
| titleOfInvention | A method for producing a non-planar single particle film, a method for producing a fine structure using the single particle film etching mask, and a fine structure obtained by the production method. |
| abstract | PROBLEM TO BE SOLVED: To provide a single particle film etching mask on a curved surface in which each particle constituting the single particle film is two-dimensionally closely packed and arranged with high precision, a method for manufacturing the same, and the single particle film etching mask A method for producing a fine structure on a curved surface and a highly accurate fine structure on a curved surface obtained by the production method are provided. Particles formed two-dimensionally on a substrate having a part or all of a surface having a pitch or size of 0.1 μm to 10000 μm in a non-planar part such as a curved surface, a slope and a step. Close-packed single particle film, A single particle film, wherein a deviation D (%) in the arrangement of particles defined by the following formula (1) is 10% or less. D (%) = | B−A | × 100 / A (1) (In formula (1), A represents the average particle diameter of the particles, and B represents the average pitch between the particles in the single particle film.) [Selection] Figure 1 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10353119-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014133310-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-5584907-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2014076983-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015182465-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2019072886-A |
| priorityDate | 2011-09-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 94.