| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6307e62bbc5f81c5810d78ceb37b47b5 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y15-00 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R1-07371
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R1-067
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R1-0735 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R1-073
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 |
| filingDate |
2011-11-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b64aaa805d23bdc32957ba1ef806228a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7adf0bb99ae89a89206807b8d26847fa
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_910e158608bd78d47ff82318625d5d4f |
| publicationDate |
2012-04-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2012068256-A |
| titleOfInvention |
Probe head with membrane suspension probe |
| abstract |
A membrane suspended probe is used as a part of a probe assembly of a needle type probe head. An elastic membrane having a first surface and a second surface on the opposite side and capable of applying a restoring force when either the first surface or the second surface is distorted; A beam 164 having a first end and a second end; a probe tip 168 in contact with a device under test near the first end of the beam 164; and a second end of the beam 164 A membrane suspension probe 104 comprising a beam contact portion in the vicinity and exposed from the first surface of the elastic membrane 170, the beam 164 for deforming the second surface of the elastic membrane 170 A probe head characterized by being able to move. [Selection] Figure 12 |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20220091186-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102271347-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20210050275-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102471772-B1 |
| priorityDate |
2004-07-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |