http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012057131-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_268be9afa00cf55b5aa72b1612151ecb |
| classificationIPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08J7-00 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08J5-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B32B7-00 |
| filingDate | 2010-09-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a274fa91a8e56b4cb95151ffcedb7169 |
| publicationDate | 2012-03-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2012057131-A |
| titleOfInvention | Method for producing functional film |
| abstract | [PROBLEMS] To protect a base material in the production of a functional film in which a protective film is laminated on a base material, and the protective film is peeled off in vacuum to perform a process such as film formation on the base material. Provided is a method for producing a film that prevents peeling between a protective film and a substrate due to a gas remaining between the films and also suppresses peeling electrification that interferes with processing of the substrate. A protective film 14 in which through holes are formed scattered all over the surface is used, and an adhesion area between the protective film 14 and a substrate 12 is reduced. [Selection] Figure 3 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-114630925-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7291606-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016097812-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014177086-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2021084911-A1 |
| priorityDate | 2010-09-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 24.