http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010079089-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_268be9afa00cf55b5aa72b1612151ecb |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05K3-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-38 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 |
| filingDate | 2008-09-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f7819d9f367b84858d4460c06df6db8f |
| publicationDate | 2010-04-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2010079089-A |
| titleOfInvention | Pattern formation method |
| abstract | The present invention provides a pattern forming method capable of obtaining excellent adhesion of a photosensitive layer to a substrate to be processed, having stable sensitivity, excellent work efficiency, and capable of forming a pattern with high definition. The pattern forming method of the present invention is a pattern forming method in which a pattern is formed on a surface to be processed of a substrate to be processed using a pattern forming material including a support and a photosensitive layer laminated on the support. A laminating step in which the pattern forming material is vacuum-laminated on the substrate to be processed so that the photosensitive layer is on the surface to be processed; and after the laminating step, the support is peeled from the photosensitive layer. And an exposure step of exposing the photosensitive layer to a desired pattern after the peeling step. [Selection] Figure 1 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012057131-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2013176224-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016035992-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2013176224-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013534326-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2014175274-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9971244-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2014175274-A1 |
| priorityDate | 2008-09-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 1136.