| abstract |
Disclosed is a gallium oxide powder excellent in uniform mixing with indium oxide powder as a raw material for IGZO. A gallium oxide powder having a bulk density (AD) of 0.40 to 0.70 g / cm 3 is proposed. Since the gallium oxide powder has a small difference in bulk density from the indium oxide powder, the gallium oxide powder can be mixed uniformly when mixed with the indium oxide powder or the like, and a homogeneous mixed sintered body, for example, a sputtering target is produced. Can do. [Selection figure] None |