| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_99505f5f312672820e9f78c254c00a4d |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-0002
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-0401
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-13025
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-14181
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-0557 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-481
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76898 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-52
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3205 |
| filingDate |
2010-12-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9d8412d23841de483874d8dacd04a7a1 |
| publicationDate |
2011-06-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2011129918-A |
| titleOfInvention |
Manufacture of a TSV interconnect structure comprising an insulating outer portion and a conductive region located within and separated from the outer portion |
| abstract |
The present invention relates to a method for manufacturing an interconnect structure. The method of manufacturing an interconnect structure according to the present invention is located inside a substrate (100), at least one trench (103, 105) forming a closed outline and inside the closed outline. Including the formation of at least one hole (102, 104), wherein the trench and the hole are separated by a region of the substrate, and the method includes filling the trench with a dielectric material (111); Filling with material (117, 122). [Selection] Figure 2D |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016167564-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015216251-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015216252-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013251539-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016531439-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014093392-A |
| priorityDate |
2009-12-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |