| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e5db580deca7130dbe51805c6c608b35 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0273
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08L5-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D129-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31144
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08L29-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D105-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76816 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08B37-16 |
| filingDate |
2009-11-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_02602d7bf4a6b83c0a7c1feabedae8f0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_51fa0ce4d4abeeaeb492059877858d89 |
| publicationDate |
2011-05-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2011099903-A |
| titleOfInvention |
Resist pattern thickening material, semiconductor device and manufacturing method thereof |
| abstract |
A resist pattern thickening material capable of producing a fine resist pattern exceeding the exposure limit in a light source of an existing exposure apparatus by efficiently thickening a resist pattern while suppressing sublimation of a low molecular compound And a semiconductor device manufactured using the resist pattern thickening material and a manufacturing method thereof. A resin, a cyclic compound represented by the following general formula (1), a compound having a cyclic structure containing a carboxyl group, and a compound having an aromatic hydrocarbon structure, water, And a resist pattern thickening material. [Selection figure] None |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2018074358-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012073393-A |
| priorityDate |
2009-11-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |