http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011095469-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_47cc435e1d443f13180f7766df104d9d |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-023 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-075 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G77-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate | 2009-10-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bba022755b00dd3565ebe341cafffca0 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d6557f8f38fef5e970aff414b5b73cd4 |
| publicationDate | 2011-05-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2011095469-A |
| titleOfInvention | Photosensitive resin composition, method for forming silica-based film using this composition, semiconductor device provided with silica-based film, flat display device, and electronic device member |
| abstract | A positive photosensitive resin composition having excellent coating properties, sufficient photosensitive properties, insulating properties, low dielectric properties, heat resistance, thick film properties, and transparency, and the photosensitive resin composition are used. The present invention provides a method for forming a silica-based coating, a semiconductor device provided with the silica-based coating, a flat display device, and an electronic device member. SOLUTION: Component (a): a siloxane resin obtained by hydrolytic condensation of a silane compound containing a compound represented by a specific general formula; (b) component: an ester compound of phenols and naphthoquinone diazide sulfonic acid (C) component: The photosensitive resin composition containing a photo-acid generator or a photobase generator. A method for forming a silica-based film using the photosensitive resin composition. A member for a semiconductor device, a flat display device, or an electronic device, comprising a substrate and a silica-based coating formed on the substrate by the method for forming a silica-based coating. [Selection] Figure 1 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2013172435-A1 |
| priorityDate | 2009-10-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 838.