Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_89afae566b725ae78e20cf972d9bcdc7 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08L83-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B29C59-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08K5-5415 |
filingDate |
2010-01-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3d3736abfdbff358789ddcf9633764d9 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d389e57c673298dfac4de111857a7519 |
publicationDate |
2011-02-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
JP-2011023698-A |
titleOfInvention |
Nanoimprinting composition and pattern forming method |
abstract |
[PROBLEMS] To improve applicability and curability of a composition for nanoimprinting. A composition for nanoimprinting according to an embodiment contains a siloxane polymer (A), an alkoxysilane compound (B), and a polymerization initiator (C). The siloxane polymer (A) is a compound having a polymerizable group that is polymerized by light irradiation. The polymerization initiator (C) is a compound that initiates and accelerates the polymerization of the siloxane polymer (A) during light irradiation. [Selection figure] None |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102542219-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9746766-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20160123240-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10501627-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013108034-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012186464-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I664239-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2016306276-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015203683-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015135916-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016207685-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014154600-A |
priorityDate |
2009-06-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |