| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H1-463 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H1-463
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H1-46
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-511 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-509 |
| filingDate |
2008-09-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2010-12-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2010539336-A |
| titleOfInvention |
Apparatus and method for ultra-high frequency plasma assisted CVD under atmospheric pressure and its application |
| abstract |
The present invention relates to a method for CVD on a substrate under atmospheric pressure, characterized by being assisted by an ultra-high frequency plasma generated by an electric field applicator having a microstrip type or hollow conductor line type elongated conductor About. The invention also relates to the use of the method for applying a conductive inorganic film to automotive body parts, in particular fenders. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9343269-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8802567-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10229814-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8624340-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10115565-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10147585-B2 |
| priorityDate |
2007-09-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |