| abstract |
When obtaining a mass spectrum in a measurement region using data collected by performing mass analysis on a plurality of different measurement points in a narrow measurement region on a sample, flight at each measurement point is caused by unevenness of the sample surface. Even if there is a difference in distance, the influence is eliminated and a mass spectrum with high mass resolution is obtained. For each mass spectrum obtained for one measurement point, mass calibration by an internal standard method is executed to correct the mass axis (S3 to S7). If there is a poorly shaped mass spectrum that may reduce the mass resolution due to integration in the calibrated mass spectrum obtained for each measurement point, it is eliminated (S8, S10), and the mass axis is accurate. By integrating the mass spectrum having a normal shape, the mass spectrum for the measurement region is obtained and displayed on the display screen (S9, S13). [Selection] Figure 3 |