http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010188668-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fcc0b66123940d1b32783569ebfa2d45 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B29C59-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B29C33-40 |
| filingDate | 2009-02-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1facff11c74801421334a59851ec009b http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7feb5f21170170f9d5faa4b06756d874 |
| publicationDate | 2010-09-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2010188668-A |
| titleOfInvention | Stamper manufacturing method and stamper |
| abstract | A method of manufacturing a stamper having a three-dimensional structure pattern by a simplified manufacturing process is provided. A negative radiation sensitive composition is coated on a substrate to form a first film derived from the negative radiation sensitive composition, the first film is exposed, and the exposed first film is exposed. Developing a first film to form a first pattern; applying the negative radiation-sensitive composition on the first pattern to form a second film; and exposing the second film. Developing the exposed second film to form a second pattern; and applying at least one curing treatment selected from heating and energy beam irradiation to the first pattern and the second pattern; . [Selection] Figure 10 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016206449-A |
| priorityDate | 2009-02-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 926.