http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010135847-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5e2e91fe0e2b9cd6fbbdebe5a7d9045f |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-458 |
| filingDate | 2010-03-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4d9cc9f02b4c945dd3c7ce79b4340b3c http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_69139ef9c5ee11486a446fbd9ffd8d33 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bb5058e210711e9f38837a07649d73af http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bd53fa903dbd8ccf964509187fcb1e5c http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_739ad033bec32a13da91f2da8a93797b http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7e65eb014a22d51fb3888aef645d7016 |
| publicationDate | 2010-06-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2010135847-A |
| titleOfInvention | Susceptor, epitaxial wafer manufacturing apparatus, and epitaxial wafer manufacturing method |
| abstract | An object of the present invention is to provide a susceptor capable of suppressing the occurrence of an autodoping phenomenon and ensuring the reliability of an epitaxial wafer when manufacturing an epitaxial wafer. In a susceptor 2B, a substrate wafer W is placed when an epitaxial wafer EPW is manufactured. The susceptor 2 </ b> B has a communication path 20 </ b> B that communicates the space 223 formed between the substrate wafer W and the susceptor 2 and the outside of the susceptor 2 when the substrate wafer W is placed. The communication path 20 </ b> B is formed so that the opening facing the space portion 223 and the opening facing the outside of the susceptor 2 do not interfere planarly in the thickness direction of the susceptor 2. The side surface portion of the susceptor 2 </ b> B is formed in a stepped shape having a cross-sectional area that decreases from the upper side toward the lower side, and has a stepped portion 26. The communication path 20B is formed in the step part 26 and communicates the space part 223 and the outside of the susceptor 2B. [Selection] Figure 7 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-110223939-A |
| priorityDate | 2010-03-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 23.