http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2004172392-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_3fb751fc1583ed35203425a4bd16589f |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-455 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205 |
| filingDate | 2002-11-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b5a8534a94ee893b1c77777bf7902e7f http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_624b2fa9533806f791d85a277fec5612 |
| publicationDate | 2004-06-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2004172392-A |
| titleOfInvention | Semiconductor epitaxial wafer manufacturing apparatus, susceptor, and susceptor support apparatus |
| abstract | An object of the present invention is to eliminate non-uniformity of dopant concentration in an epitaxial growth layer without causing a problem such as inconsistency in in-plane distribution of film thickness of the epitaxial growth layer and without forming an oxide film on a silicon wafer substrate. . A plurality of discharge holes (12, 12 ') are formed in a portion of a susceptor (10) where a silicon wafer substrate (1) is placed. Further, the discharge hole 12 is formed by inclining the susceptor 10 at a predetermined angle θ, or a radiation heat shielding plate (light shielding plate) 30 having a size corresponding to the silicon wafer substrate 1 is disposed below the susceptor 10. . [Selection diagram] FIG. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102513858-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20220083083-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010135847-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111517257-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2006100345-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4496052-B2 |
| priorityDate | 2002-11-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 28.