http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010135502-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c5520dd38cc403678d9f91e0b0ee95fb |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-786 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-336 |
| filingDate | 2008-12-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_75fc94b60018d119b5f3c182fcdd7687 |
| publicationDate | 2010-06-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2010135502-A |
| titleOfInvention | Semiconductor device and manufacturing method thereof |
| abstract | A semiconductor element in which an off current is reduced while securing an on current is provided. An active layer including a substrate, an active layer supported by the substrate, the channel region, and a first region and a second region formed on both sides of the channel region, and an active layer A first contact layer 16a and a second contact layer 16b in contact with the first region and the second region, respectively, a first electrode 17a electrically connected to the first region via the first contact layer, and a second contact A second electrode 17b electrically connected to the second region through the layer 16b and a gate electrode 12 disposed to face the channel region through the gate insulating layer 13 are provided. The active layer 14A has a first microcrystalline silicon layer 14m having a peak area intensity attributed to SiH / peak area intensity attributed to SiH 2 of 2 or more in the Raman spectrum. [Selection] Figure 1 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9252158-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010018479-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012049517-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2012063723-A1 |
| priorityDate | 2008-12-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559541 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5461123 |
Total number of triples: 17.