http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010132536-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e3b0a3dbf8d6c9712d86ea1383fd5327 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01B33-035 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01B33-107 |
| filingDate | 2009-10-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f4ed4c3db5f38e5e4d4ce5aa464a9747 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ff96ddb7b977426875fedb4e0696df7f |
| publicationDate | 2010-06-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2010132536-A |
| titleOfInvention | Production method and use of trichlorosilane |
| abstract | A method for producing a high recovery rate of trichlorosilane, in which decomposition of trichlorosilane and generation of a polymer are suppressed in a step of cooling a gas generated by a conversion reaction. A raw material tetrachlorosilane and hydrogen are converted at a temperature of 1000 to 1900 ° C. to generate a reaction gas containing trichlorosilane, dichlorosilylene, hydrogen chloride, and a higher order silane compound, and the reaction gas is cooled. In the method for recovering trichlorosilane, (a) a first cooling step in which the reaction gas extracted from the conversion furnace is cooled to 600 ° C. or higher within 0.01 seconds and 500 ° C. or lower within 2 seconds from the start of cooling. And (b) an intermediate reaction step in which the reaction gas after the first cooling step is maintained in a temperature range of 500 ° C. to 950 ° C. for a time of 0.01 seconds to 5 seconds, and (c) after the intermediate reaction step. A method for producing trichlorosilane, comprising a second cooling step of cooling the reaction gas of less than 500 ° C. [Selection] Figure 4 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11229893-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013023398-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2018008642-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016064951-A |
| priorityDate | 2008-10-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 44.