| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e3b0a3dbf8d6c9712d86ea1383fd5327 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01B33-1071
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01B33-107 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01B33-107 |
| filingDate |
2007-10-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f83d07ade04f4cd210e04ae717a93a67
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ff96ddb7b977426875fedb4e0696df7f |
| publicationDate |
2008-07-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2008156209-A |
| titleOfInvention |
Trichlorosilane production method and trichlorosilane production apparatus |
| abstract |
A trichlorosilane production method and a trichlorosilane production apparatus capable of improving thermal efficiency and conversion rate in a conversion reaction in which trichlorosilane is generated by reaction of tetrachlorosilane and hydrogen. Tetrachlorosilane and hydrogen are reacted at 900 ° C. to 1900 ° C. to generate a reaction product gas containing trichlorosilane and hydrogen chloride, and the reaction product gas derived from the reaction chamber is heated to 300 ° C. to 800 ° C. By cooling, the cooling rate of the reaction product gas is optimized to prevent the reverse reaction to tetrachlorosilane and the by-product of the polymer, and this cooled reaction product gas is introduced into at least tetrachlorosilane or hydrogen introduced into the reaction chamber 2. A method and apparatus for producing trichlorosilane, which is preheated by exchanging heat with one side. [Selection] Figure 1 |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013510068-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101133658-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013540689-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010235439-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2010050241-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8168152-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101055751-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012507469-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2010116500-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010132536-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010105865-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2010116500-A1 |
| priorityDate |
2006-11-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |