Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_89afae566b725ae78e20cf972d9bcdc7 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C381-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C309-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C309-09 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F220-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F220-12 |
filingDate |
2008-11-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b371d878503af0da2b50566aef90ca7d http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_52cce40b8476edb4278cec332665b093 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5629ea1962b41d0773eaf45e8af40283 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_321d114d76108c3dfde0d4c0b5877dde |
publicationDate |
2010-05-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
JP-2010116353-A |
titleOfInvention |
Resist composition, resist pattern forming method, novel compound and acid generator |
abstract |
A novel compound, an acid generator using the compound, a resist composition containing the acid generator, and a resist pattern forming method using the same are provided. A resist containing a base component (A) whose solubility in an alkaline developer is changed by the action of an acid and an acid generator component (B) containing a compound represented by formula (b1-1) Composition; wherein R 1 ″ to R 3 ″ represent an aryl group or an alkyl group, at least one of which is a substituted aryl group substituted with a group represented by the formula (b1-1-0); Any two may be bonded to each other to form a ring together with the sulfur atom in the formula. X is a hydrocarbon group having 3 to 30 carbon atoms, Q 2 is a single bond or an alkylene group, and p is an integer of 1 to 3. W is an alkylene group having 2 to 10 carbon atoms. ] [Chemical 1] [Selection figure] None |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101821233-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8940476-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012173438-A |
priorityDate |
2008-11-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |