http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010107992-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_268be9afa00cf55b5aa72b1612151ecb |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F12-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-038 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 |
| filingDate | 2009-12-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f110e0e7102931afe7edfc0254e94e54 |
| publicationDate | 2010-05-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2010107992-A |
| titleOfInvention | Negative resist composition and pattern forming method using the same |
| abstract | [PROBLEMS] To solve the problem of performance improvement technology in microfabrication of semiconductor elements, particularly high sensitivity, high resolution, good pattern heat resistance, reduction of outgas, and reduction of surface roughness in microfabrication of semiconductor elements. And a pattern forming method using the same. SOLUTION: (A) an alkali-soluble resin, (B) a compound that generates an acid upon irradiation with actinic rays or radiation, and (C) an alcohol or cyclic having a cyclic structure that reacts by the action of an acid or a cyclic structure. A negative resist composition containing a crosslinking agent that forms a crosslink in an alkali-soluble resin with the elimination of a carboxylic acid having 7 or more carbon atoms having a structure, and a pattern forming method using the same. [Selection figure] None |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013534544-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016074909-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017095710-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102021301-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10545405-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20170108092-A |
| priorityDate | 2009-12-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 193.