http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010017841-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_424db9d56b06a23aed410fcf5df652f3 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14 |
| filingDate | 2009-05-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_606646591b946417aad81333af6c98ad http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b0f73da3153cc5d6f1ca249bbafb4cc9 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d3660f83eec299e3f860c25c2f89e68d http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dcd80998bda762740ae05221e3b632d5 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_36c2968500cc5fe9bc6e3c28895d61bd |
| publicationDate | 2010-01-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2010017841-A |
| titleOfInvention | Abrasive for synthetic quartz glass substrate |
| abstract | A polishing agent for a synthetic quartz glass substrate comprising a colloid solution and a polycarboxylic acid polymer, wherein the colloid concentration is 20 to 50% by mass. According to the present invention, a high-sensitivity defect inspection apparatus for a synthetic quartz glass substrate surface in the production of synthetic quartz glass such as a synthetic quartz glass substrate for a photomask used in an optical lithography method important for the production of ICs and the like. The generation of defects detected in (1) is suppressed, the yield is expected to be improved in semiconductor device manufacturing and the like, and the semiconductor industry is further refined. In addition, for a synthetic quartz glass substrate for a photomask having a thick end surface used for a display-related material, generation of defects in polishing can be suppressed and yield can be improved. [Selection figure] None |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014080461-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2014057932-A1 |
| priorityDate | 2008-06-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 46.