| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02E10-546
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02P70-50 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-1812
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-182 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L31-04 |
| filingDate |
2007-07-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2009-12-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2009545165-A |
| titleOfInvention |
Method and system for manufacturing polycrystalline silicon and silicon-germanium solar cells |
| abstract |
A novel and unprecedented method and system for manufacturing silicon or silicon-germanium solar cells. High purity gas and / or liquid intermediate compounds of silicon (or silicon-germanium) are converted directly into polycrystalline films by thermal plasma chemical deposition or thermal plasma spray techniques. An intermediate compound of silicon (or silicon-germanium) is injected into a thermal plasma source that is at a temperature of 2000 to about 20000 K. The compound dissociates and silicon (or silicon-germanium) is deposited on the substrate. A polycrystalline film having a density close to the bulk value is obtained upon cooling. PN junction solar cells are prepared directly by spraying, or the doped films after heat treatment are converted to high performance, low cost viable solar cells with high productivity. A roll-to-roll or cluster tool type automated continuous system is provided. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2012177099-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014060036-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8703613-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2012177099-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8624340-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015144129-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8802567-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014187017-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012174500-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013120633-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013037977-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013120685-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013093264-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013093266-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10115565-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012038839-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10147585-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9343269-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10229814-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013211244-A |
| priorityDate |
2006-07-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |