| abstract |
A carbon nanotube (CNT) array is patterned on the substrate. The substrate may be a microelectronic die, a flip chip interposer type structure, a mounting substrate, or a circuit substrate. In order to form the CNT array by chemical vapor deposition, the CNT array is patterned using a patterned metal seed layer on the substrate. In order to form the CNT array by growth, the patterned CNT array may also be patterned using a patterned mask. Computer systems that use the CNT array for heat transport from the die are also used. |