| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-265
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-249953 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02282
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02126
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D5-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02216
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-316
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D183-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3122 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-312
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-522
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D5-25
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D183-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05D7-24 |
| filingDate |
2006-08-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2009-02-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2009505811-A |
| titleOfInvention |
Low dielectric constant silicone coatings, preparation methods and their application to integrated circuits |
| abstract |
The present invention includes: a) depositing a film-forming silicone composition on a substrate surface (wherein the silicone composition is: (i) at least one film-forming silicone cross-linked resin, (ii) at least one α, ω- Hydroxylated, substantially linear, thermally decomposable silicone oil, and (iii) at least one silicone resin (i) and a solvent for compatibilizing silicone oil (ii)) B) Solvent (iii) is removed simultaneously or sequentially, preferably by heating, and c) a low dielectric constant silicone coating which consists essentially in curing the film-forming silicone composition by heating. On how to do. Also disclosed is a silicone coating obtained by carrying out the method of the present invention and an integrated circuit comprising said silicone coating in the form of an electrical insulator. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7104161-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2021501250-A |
| priorityDate |
2005-08-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |